The production system Tetra 5600, with its 5600-litrechamber volume and PC control, is used in series production (cleaning, etchingand activation).

Special plasma system Tetra 5600-LF-PC

Technical data:

Switch cabinet:
W 1800 mm, H 2200 mm, D 1800 mm

Chamber:
W 2250 mm, H 2450 mm, D 1000 mm

Chamber volume:
approx. 5600 litres

Gas supply:
3 gas channels via MFCs

Generator:
6 pieces (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)

Parts holding:
loading via roll wagons
(optional: special drum)